摘要：
Embodiments described herein generally relate to a brush, a method of forming a brush, and a structure embodied in a machine readable medium used in a design process are provided. The brush includes a body and a channel configured to deliver a cleaning liquid through holes in the body. The method forms the brush using 3D printing. The structure provides details for making the brush. The disclosure herein allows a method of forming a brush that does not require the removal of active porogen.
技术问题语段：
The technical problem addressed in this patent is the need for a better method of manufacturing brushes with control over material properties, such as porosity, hole size, and hole variation, which are important for effective post-CMP cleaning. The current methods of introducing porosity into brush materials involve blending a pre-polymer composition with a porogen, which is cumbersome and lengthy. The patent proposes a new method to overcome this issue and create more efficient and effective brushes.
技术功效语段：
The present patent relates to a new method for making brushes used in post-CMP cleaning processes. The method allows for better control of material properties, such as porosity and hole size, which improve the effectiveness of the brush in removing residue and particles. The brushes are made using a three-dimensional printing process, which allows for more precise control of the material properties. The method also includes a design process that allows for easy customization of the brush design. The technical effects of this patent include improved control over brush material properties, better post-CMP cleaning, and easier customization of brush designs.
权利要求：
Claims:
1. A brush, comprising: a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and a channel disposed in the body, the channel fluidly coupled to the plurality of body holes.
2. The brush of claim 1 , wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity.
3. The brush of claim 2, wherein the first polymer material has a third body region, a third body porosity of the third body region is greater than the first body porosity, and the third body porosity is less than the second body porosity.
4. The brush of claim 1 , further comprising a plurality of brushing elements disposed on the body, the brushing elements comprising a second polymer material.
5. The brush of claim 4, wherein the brushing elements comprise a plurality of element holes having a first element region, wherein a first element porosity of the first element region is greater than about 70%, and the channel is fluidly coupled to the plurality of element holes.
6. A structure embodied in a machine readable medium used in a design process, the structure comprising: a brush, comprising:
a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and a channel disposed in the body, the channel fluidly coupled to the plurality of body holes.
7. The structure of claim 6, wherein the structure resides on storage medium as a data format used for an exchange of layout data.
8. The structure of claim 6, wherein the structure includes at least one of test data files, characterization data, verification data, or design specifications.
9. The structure of claim 6, wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity.
10. The structure of claim 6, wherein the brush further comprises a plurality of brushing elements disposed on the body, the brushing elements comprising a second polymer material.
11. A method of forming a brush, comprising: forming a body of the brush using a three-dimensional (3D) printing process, the body comprising a first solid material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and forming a channel in the body of the brush using a 3D printing process, the channel fluidly coupled to the body plurality of holes.
12. The method of claim 11 , wherein the 3D printing process comprises: exposing a surface of a printing liquid to treatment emission, such that at least a portion of the printing liquid is converted to a solid material; and raising a support member coupled to the solid material while a time-varying treatment emission is applied to the surface.
13. The method of claim 12, wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity.
14. The method of claim 13, wherein the first solid material has a third body region, a third body porosity of the third body region is greater than the first body porosity, and the third body porosity is less than the second body porosity.
15. The method of claim 12, wherein the time-varying treatment emission comprises ultraviolet (UV) light.
16. The method of claim 12, wherein the printing liquid comprises a photopolymer.
17. The method of claim 12, further comprising forming a plurality of brushing elements disposed on the body using a 3D printing process, each of the brushing elements comprising the first solid material comprising a plurality of element holes, the plurality of element holes having a first element region, wherein a first element porosity of the first element region is greater than about 70%.
18. The method of claim 17, wherein the channel is fluidly coupled to the plurality of element holes.
19. The method of claim 12, wherein the first body region comprises a random distribution of holes.
20. The method of claim 19, wherein the random distribution of holes is at least partially created by waves at the surface of the printing liquid.