IPC分类号:
F04D19/04 | B22F7/08 | B22F10/14 | B22F10/18 | B22F10/25 | B22F10/28 | B33Y10/00 | B33Y80/00
国民经济行业分类号:
C3442 | C3441 | C3462
当前申请(专利权)人:
EDWARDS JAPAN LIMITED
原始申请(专利权)人:
EDWARDS JAPAN LIMITED
当前申请(专利权)人地址:
1078-1, YOSHIHASHI, YACHIYO-SHI CHIBA 2768523
摘要:
A vacuum pump which can prevent wasting of materials and can be manufactured
easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings
are provided, and the rotating body has a structure that a second component is caused to cover
10 a periphery of a first component disposed on an inner side. The second component is
formed by solidifying a powder. The first component is formed of at least any one of an
extruded material, a cast material, and a forged material. The second component is formed
of a green pellet.
15 Figure No. 1
技术问题语段:
The technical issues addressed in the patent text are the methods of combining a rotor shaft and a rotor disc in a vacuum pump. Each method has its own problems, such as difficulty in machining the rotor disc.
技术功效语段:
The technical efficacy of the patent text is that it describes a method of combining a cylindrical rotor shaft and a disc-shaped rotor disc separately, and then combining them.
权利要求:
[Claim 1]
A vacuum pump comprising:
5 a vacuum vessel; and
a rotating body installed rotatably in the vacuum vessel, wherein
the rotating body has a structure in which a second component is caused to cover a
periphery of a first component disposed on an inner side.
10 [Claim 2]
The vacuum pump according to claim 1, wherein
the first component is formed of at least any one of an extruded material, a cast
material, and a forged material.
15 [Claim 3]
The vacuum pump according to claim 1, wherein
the first component is formed by a stereoscopic shaping device using a PBF method
or a DED method.
20 [Claim 4]
The vacuum pump according to claim 1, wherein
the first component is sintered after being formed by the stereoscopic shaping
device using a BJ method or an FDM method.
25 [Claim 5]
The vacuum pump according to any one of claims 1 to 4, wherein
the second component is formed of a green pellet.
[Claim 6]
30 The vacuum pump according to any one of claims 1 to 4, wherein
the second component is formed by the stereoscopic shaping device using the BJ
method or the FDM method.
[Claim 7]
The vacuum pump according to any one of claims 1 to 6, wherein
the first component and the second component caused to cover the first component
are both subjected to sintering processing.
[Claim 8]
The vacuum pump according to claim 7, wherein
the first component and the second component are clearance fit before the sintering
processing and is interference fit after the sintering processing.
[Claim 9]
The vacuum pump according to any one of claims 1 to 8, wherein
the second component includes a rotor blade for turbo-molecular pump mechanism
constituted by a blade row disposed radially.
[Claim 10]
The vacuum pump according to any one of claims 1 to 9, wherein
the second component includes a rotor blade for Siegbahn-type pump mechanism
constituted by a disc portion disposed on an outer peripheral surface.
[Claim 11]
The vacuum pump according to any one of claims 1 to 10, wherein
the second component includes a rotor blade for Holweck-type pump mechanism
constituted by a cylinder portion disposed on the outer peripheral surface.
[Claim 12]
A rotating body for vacuum pump installed rotatably in a vacuum vessel of a
vacuum pump, characterized by having
a structure in which a second component formed by solidifying a powder is caused
30 to cover a periphery of a first component disposed on an inner side.
[Claim 13]
The rotating body for vacuum pump according to claim 12 wherein
the first component and the second component caused to cover the first component
are subjected to sintering processing altogether.
[Claim 14]
5 A manufacturing method of a vacuum pump including;
a vacuum vessel; and
a rotating body installed rotatably in the vacuum vessel, wherein
the rotating body includes:
a first process in which a second component formed by solidifying a powder is
10 caused to cover a periphery of a first component disposed on an inner side; and
a second process in which the first component and the second component are
subjected to sintering processing altogether.
[Claim 15]
15 The manufacturing method of a vacuum pump according to claim 14, wherein
the first component and the second component are clearance fit before the sintering
processing and are interference fit after the sintering processing.