Vacuum pump, rotating body for vacuum pump, and method for manufacturing vacuum pump

公开(公告)号:
SG11202403932RA
公开(公告)日:
2024-07-31
申请号:
SG11202403932R
申请日:
2023-01-11
授权日:
-
受理局:
新加坡
专利类型:
发明申请
简单法律状态:
审中
法律状态/事件:
公开
IPC分类号:
F04D19/04 | B22F7/08 | B22F10/14 | B22F10/18 | B22F10/25 | B22F10/28 | B33Y10/00 | B33Y80/00
战略新兴产业分类:
-
国民经济行业分类号:
C3442 | C3441 | C3462
当前申请(专利权)人:
EDWARDS JAPAN LIMITED
原始申请(专利权)人:
EDWARDS JAPAN LIMITED
当前申请(专利权)人地址:
1078-1, YOSHIHASHI, YACHIYO-SHI CHIBA 2768523
工商统一社会信用代码:
-
工商登记状态:
-
工商注册地址:
-
工商成立日期:
-
工商企业类型:
-
发明人:
KABASAWA TAKASHI
代理机构:
-
代理人:
DREW & NAPIER LLC
摘要:
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided. Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover 10 a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet. 15 Figure No. 1
技术问题语段:
The technical issues addressed in the patent text are the methods of combining a rotor shaft and a rotor disc in a vacuum pump. Each method has its own problems, such as difficulty in machining the rotor disc.
技术功效语段:
The technical efficacy of the patent text is that it describes a method of combining a cylindrical rotor shaft and a disc-shaped rotor disc separately, and then combining them.
权利要求:
[Claim 1] A vacuum pump comprising: 5 a vacuum vessel; and a rotating body installed rotatably in the vacuum vessel, wherein the rotating body has a structure in which a second component is caused to cover a periphery of a first component disposed on an inner side. 10 [Claim 2] The vacuum pump according to claim 1, wherein the first component is formed of at least any one of an extruded material, a cast material, and a forged material. 15 [Claim 3] The vacuum pump according to claim 1, wherein the first component is formed by a stereoscopic shaping device using a PBF method or a DED method. 20 [Claim 4] The vacuum pump according to claim 1, wherein the first component is sintered after being formed by the stereoscopic shaping device using a BJ method or an FDM method. 25 [Claim 5] The vacuum pump according to any one of claims 1 to 4, wherein the second component is formed of a green pellet. [Claim 6] 30 The vacuum pump according to any one of claims 1 to 4, wherein the second component is formed by the stereoscopic shaping device using the BJ method or the FDM method. [Claim 7] The vacuum pump according to any one of claims 1 to 6, wherein the first component and the second component caused to cover the first component are both subjected to sintering processing. [Claim 8] The vacuum pump according to claim 7, wherein the first component and the second component are clearance fit before the sintering processing and is interference fit after the sintering processing. [Claim 9] The vacuum pump according to any one of claims 1 to 8, wherein the second component includes a rotor blade for turbo-molecular pump mechanism constituted by a blade row disposed radially. [Claim 10] The vacuum pump according to any one of claims 1 to 9, wherein the second component includes a rotor blade for Siegbahn-type pump mechanism constituted by a disc portion disposed on an outer peripheral surface. [Claim 11] The vacuum pump according to any one of claims 1 to 10, wherein the second component includes a rotor blade for Holweck-type pump mechanism constituted by a cylinder portion disposed on the outer peripheral surface. [Claim 12] A rotating body for vacuum pump installed rotatably in a vacuum vessel of a vacuum pump, characterized by having a structure in which a second component formed by solidifying a powder is caused 30 to cover a periphery of a first component disposed on an inner side. [Claim 13] The rotating body for vacuum pump according to claim 12 wherein the first component and the second component caused to cover the first component are subjected to sintering processing altogether. [Claim 14] 5 A manufacturing method of a vacuum pump including; a vacuum vessel; and a rotating body installed rotatably in the vacuum vessel, wherein the rotating body includes: a first process in which a second component formed by solidifying a powder is 10 caused to cover a periphery of a first component disposed on an inner side; and a second process in which the first component and the second component are subjected to sintering processing altogether. [Claim 15] 15 The manufacturing method of a vacuum pump according to claim 14, wherein the first component and the second component are clearance fit before the sintering processing and are interference fit after the sintering processing.
技术领域:
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背景技术:
-
发明内容:
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具体实施方式:
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