摘要：
A method of forming a nanopore sensing device, comprises providing a substrate 102 having a surface with an array of electrodes 6 for connecting to an electronic circuit. Separately, a well array structure 108 is provided, which has an array of walls defining through holes for defining wells. The substrate and well array structures are aligned so that the array of electrodes define, at least in part, a portion of the bases of respective wells at the bottom of the through holes. The well array structure may be moulded onto the substrate (figs 4(a) to 4(f)). Alternatively, a structure having an array of walls defining through holes may be aligned and adhered to a substrate having an array of electrodes, on which a patterned adhesive surface 114 is provided. Alternatively, a substrate having an electrically conducting layer on a backside may be provided, on which vias penetrating through the substrate are formed, and at least partially filled with conductive filling material to form electrodes. A portion of the electrically conducting layer may be removed to form electrical contacts, and part of the front side of the substrate removed to form an array of wells (figs 13(a) to 13(e)).
权利要求：
CLAIMS
1. A method of forming a sensing device for supporting a plurality of nanopores upon an array of wells, the method comprising:
providing a substrate, said substrate having a surface having an array of electrodes located thereon for connecting to or for configuring upon an electronic circuit,
separately providing a well array structure, having an array of walls defining through-holes for defining wells, and
aligning said through-holes and said array of electrodes such that said well array structure becomes part of the substrate and such that said electrodes define, at least in part, a portion of the bases of respective wells.
2. A method as claimed in claim 1, further comprising providing an electronic circuit formed independently of said well array structure which contacts or comprises said electrodes.
3. The method as claimed in claim 2 wherein said electronic circuit is provided on said substrate and said method comprises forming said well array structure onto said substrate.
4. The method as claimed in claim 3 comprising moulding the well array structure onto the substrate.
5. The method as claimed in claim 1 or 2 comprising forming said through-holes in said substrate and forming said electrodes by providing a conductive material in each through-hole to form at least part of a base of a respective well, or connect to an electrode in the base of the well.
6. The method as claimed in claim 5 wherein said electronic circuit is provided on a further substrate and said method comprises attaching said further substrate to said sensing device such that said electronic circuit is electrically connected to said electrodes.
fl. The method as claimed in claim providing said well array structure comprises attaching a pre-formed well array structure to said substrate wherein the electronic circuit is provided on a printed circuit board.
8. The method as claimed in any preceding claim wherein the well array structure has a thickness of less than 0.5mm.
9. The method as claimed in any preceding claim wherein the wells in the well array structure have a pitch of between about 10 and about 1000 microns, and preferably between about 200 and about 800 microns, and more preferably between about 150 and about 250 microns.
10. The method as claimed in any preceding claim wherein the through-holes have a diameter of less than 200 microns.
11. A method of forming a sensing device for supporting a plurality of nanopores upon an array of wells, the method comprising:
providing a substrate having an array of electrodes located on a surface thereof for connecting to or forming part of an electronic circuit,
providing a mould defining an inverse well array structure comprising an array of protrusions on an underside thereof:
depositing a polymer onto the underside of the mould;
aligning the underside of the mould that is filled with polymer against the substrate such that the protrusions are each aligned with a corresponding electrode;
applying a mutual pressure to the substrate and the protrusions to exclude the polymer from at least a portion of the electrodes;
processing the polymer to cure and secure the polymer to the substrate; and
separating the mould from the polymer, whereby an array of wells of the well array structure are formed by through-holes in the polymer corresponding to the protrusions and a single electrode forming at least part of a base of each well.
12. The method as claimed in claim 11 wherein the protrusions each define in respective through-holes an array of fins terminated by a continuous wall portion adjacent said substrate formed by a distal portion of said protrusion having a continuous perimeter.
13. The method as claimed in claim 11 or 12 wherein providing the mould comprises depositing a moulding material onto a master well array structure comprising a plurality of wells to form the mould; and separating the mould from the master well array structure.
14. The method as claimed in claim 12, wherein the moulding material is a thermoplastic.
15. The method as claimed in claim 13 or 14, wherein the moulding material is polydimethylsiloxane.
16. A method as claimed in claim 13, 14 or 15, wherein the master well array structure is fabricated from a silicon wafer.
17. The method as claimed in any of claims 11 to 16, wherein the polymer is poly(methyl methacrylate).
18. The method as claimed in any of claims 11 to 17, wherein the polymer is dissolved in a solvent before being deposited onto the underside of the mould.
19. The method as claimed in claim 18, comprising heating the polymer to evaporate the solvent.
20. A method as claimed in any of claims 11 to 19, wherein before positioning the underside of the mould against the substrate, a polymer is deposited onto the substrate.
21. A method as claimed in any of claims 11 to 20, wherein the cured polymer is subsequently peelable from the substrate.
22. A mould adapted for use in the method described in claim 11 or 12.
23 A master well array structure, adapted for use in the method as claimed in claim 13.
24. A method of forming a sensing device for supporting a plurality of nanopores upon an array of wells, the method comprising:
providing a well array structure having an array of walls defining through-holes for forming wells
providing a substrate having an array of electrodes located on a surface thereof for connecting to or forming part of an electronic circuit,
providing a patterned adhesive surface on at least one of the well array structure or the substrate, wherein said patterned adhesive surface defines a plurality of portions without adhesive;
thereafter, aligning the well array structure and substrate such that the electrodes are aligned with the plurality of portions without adhesive and with the through-holes in the well array structure such that the electrodes define, at least in part, a portion of a single well;
using the patterned adhesive surface to adhere the well array structure to the substrate.
25. A method as claimed in claim 24 further comprising providing an electronic circuit formed independently of said well array structure which contacts or comprises said electrodes
26. The method as claimed in claim 24 or 25, comprising heating the adhesive surface to adhere the well array structure to the substrate.
27. The method as claimed in claim 24, 25 or 26, comprising exposing the adhesive surface to electromagnetic radiation to adhere the well array structure to the substrate.
28. The method as claimed in any of claims 24 to 27, comprising heating the adhesive surface only to a temperature below the outgassing temperature of components of the electronic circuit.
29. The method as claimed in any of claims 24 to 28 wherein providing the patterned adhesive surface comprises exposing a photo-patternable adhesive to light.
30. The method of as claimed in claim 24, wherein exposing the photo-patternable adhesive to light provides said plurality of portions without adhesive.
31. The method as claimed in any of claims 20 to 26, wherein the adhesive surface is integrated into one of the well array structure or the substrate.
32. The method as claimed in any one of claims 24 to 30 further comprising applying the patterned adhesive surface as an independent layer to the well array structure or the substrate.
33. ‘The method as claimed in claim 32, comprising providing an adhesive layer on a liner and forming a pattern in said adhesive layer, thereby forming said independent patterned adhesive surface layer.
30. The method as claimed in claim 28, further comprising transferring the independent layer onto the well array structure or the substrate using an intermediate surface.
31. The method as claimed in claim 30, wherein the intermediate surface is formed from polydimethylsiloxane.
32. The method as claimed in claim 28, further comprising providing the patterned adhesive surface layer on the well array structure or the substrate using an aerosol spray or micro-drop dispenser.
33. The method as claimed in claim 28, comprising adhering the well array structure to the substrate using capillary action of an adhesive to form said patterned adhesive surface layer.
34. A method of forming a sensing device for supporting a plurality of nanopores upon an array of wells, the method comprising
providing a substrate having an electrically conductive layer on a backside thereof;
forming vias penetrating through the substrate;
at least partially filling said vias with a conductive filling material to form electrodes;
removing a portion of the electrically conductive layer to form electrical contacts each in contact with a respective electrode for connecting to an electronic circuit;
removing part of the frontside of said substrate to form an array of wells, such that each electrode forms at least in part, a portion of a single well.
35. A method as claimed in claim 34, further comprising providing an electronic circuit formed independently of said well array structure which contacts said electrodes.
36. A method as claimed in claim 34 or 35 comprising applying a coating to said conductive filling material to provide said electrode.
37. A method as claimed in claim 34, 35 or 36, wherein removing part of the frontside of said substrate comprises ablating the substrate.
38. A method as claimed in any of claims 34 to 37, comprising using a laser to remove part of the frontside of said substrate.
39. A method as claimed in any of claims 34 to 38, comprising using scanned mask imaging to form the well array structure.
40. A method as claimed in any of claims 34 to 39, comprising forming said vias in first and second steps wherein the first step comprises forming a first part of the via and the second step comprises forming a second part of the via having a greater cross-sectional area than the first part of the via.
41. A method as claimed in claim 40, comprising filling only the second part of the via with the conductive filling material.
42. A method of forming a well array device as claimed in any of claims 34 to 41, wherein forming said well array structure comprises initially forming a pillar layer and subsequently forming a layer of wells between respective pillars.
43. A method of forming a well array device as claimed in any of claims 34 to 42, wherein partially filling said vias with said conductive filling material comprises forming the conductive filling material into protrusions on the backside of the thermoplastic substrate.
44. A method of forming a sensing device for supporting a plurality of nanopores upon an array of wells, the method comprising
providing a substrate having an electrically conductive layer on at least a frontside thereof;
forming vias penetrating through the substrate;
filling said vias with a conductive filling material;
removing a portion of the electrically conductive layer to form a plurality of electrodes on the frontside of said substrate
attaching to the frontside of the substrate a well array structure comprising an array of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well.
45. A method as claimed in claim 44, further comprising providing an electronic circuit formed independently of said well array structure on a backside of the substrate wherein said electronic circuit is electrically connected to said electrodes by said vias.
46. A method as claimed in claim 44, wherein said substrate has an electrically conductive layer on a backside thereof, the method further comprising removing a portion of the backside electrically conductive layer to form electrical contacts each in electrical contact with a respective electrode for connecting to an electronic circuit.
47. A method as claimed in claim 46 comprising providing an electronic circuit formed independently of said well array structure and connecting said electronic circuit to said electrical contacts on said substrate.
48. A method as claimed in any of claims 44 to 47, wherein attaching the well array structure onto the frontside of the substrate comprises:
providing a patterned adhesive surface on at least one of the well array structure or the substrate, wherein said patterned adhesive surface defines a plurality of portions without adhesive;
thereafter, aligning the well array structure and substrate such that the electrodes are aligned with the plurality of portions without adhesive and with the through-holes in the well array structure such that the electrodes define, at least in part, a portion of a single well;
using the patterned adhesive surface to adhere the well array structure to the substrate.
49. A method of as claimed in any of claims 44 to 47, wherein attaching the well array structure onto the frontside of the thermoplastic substrate comprises:
providing a mould defining an inverse well array structure comprising an array of protrusions on an underside thereof;
depositing a polymer onto the underside of the mould;
aligning the underside of the mould that is filled with polymer against the substrate such that the protrusions are each aligned with a corresponding electrode;
applying a mutual pressure to the substrate and the protrusions to exclude the polymer from at least a portion of the electrodes;
processing the polymer to cure and secure the polymer to the substrate; and
separating the mould from the polymer, whereby an array of wells of the well array structure are formed by through-holes in the polymer corresponding to the protrusions and a single electrode forming at least part of a base of each well.
50. A method as claimed in any of claims 44 to 49, wherein filling said vias with said conductive filling material comprises forming the conductive filling material into protrusions on the frontside and/or the backside of the substrate.
51. A method as claimed in any of claims 34 to 50, wherein the conductive filing material comprises carbon and/or silver paste.
52. A method as claimed in any of claims 34 to 51, wherein the electrically conductive layer comprises platinum and/or silver.
53. A method as claimed in any preceding claim comprising adding an aqueous solution to the wells of the well array structure.
54. A method as claimed in claim 50 wherein the aqueous solution comprises a polar medium.
55. A method as claimed in claim 53 or 54 further comprising forming a plurality of membranes comprising amphiphilic molecules in the wells of the well array structure to encapsulate the aqueous solution therein, thereby forming an array of discrete electrically isolated volumes.
56. A method as claimed in claim 55 wherein the amphiphilic molecules comprise a hydrophilic head group and a hydrophobic tail group.
57. A method as claimed in any preceding claim, wherein the substrate is a thermoplastic substrate.
58. A method as claimed in any preceding claim, wherein the substrate initially has a uniform thickness.
50. A sensor apparatus comprising:
an electronic circuit;
a substrate;
an array of electrodes located on a surface of the substrate;
a well array structure, moulded from a polymer, comprising a plurality of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well; and
wherein the array of electrodes form part of the electronic circuit or are connected to the electronic circuit.
6061. A sensor apparatus as claimed in claim 60 wherein the polymer is poly(methyl methacrylate) (PMMA).
61. The apparatus as claimed in claim 59 wherein the wells each define an array of fins terminated by a continuous wall portion adjacent said substrate.
62. A sensor apparatus comprising:
an electronic circuit;
a substrate;
an array of electrodes located on a surface of the substrate;
a well array structure comprising a plurality of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well, wherein said wells each comprise an array of fins terminated by a continuous wall portion adjacent said substrate; and
wherein the array of electrodes form part of the electronic circuit or are connected to the electronic circuit.
63. A sensor apparatus comprising:
an electronic circuit;
a thermoplastic substrate;
an array of electrodes located on a surface of the substrate;
a well array structure comprising a plurality of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well; and
wherein the array of electrodes is connected to the electronic circuit.
64. A sensor apparatus comprising:
a substrate comprising a plurality of vias at least partially filled with conductive filing material thereby forming an array of electrodes;
a well array structure formed from the substrate to define an array of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well; and
a plurality of electrical contacts on a backside of the substrate each in contact with a respective electrode for connecting to an electronic circuit.
65. A sensor apparatus as claimed in claim 64, comprising an electronic circuit connected to the electrical contacts.
66. A sensor apparatus as claimed in claim 64 or 65 wherein the substrate is a thermoplastic substrate.
67. A sensor apparatus comprising:
a substrate comprising a plurality of vias penetrating through the substrate, at least partially filled with conductive material and forming a plurality of electrodes;
a well array structure adhered to a frontside of the substrate, said well array structure comprising an array of walls defining through-holes which together with the electrodes define a plurality of wells, such that each electrode forms at least in part, a portion of a single well; and
an electronic circuit on or connected to a backside of a thermoplastic substrate.
68. A sensor apparatus as claimed in claim 67 wherein the substrate has connectors for making electrical contact with an electronic circuit.
69. A sensor apparatus as claimed in claim 68 wherein the connectors comprise protrusions from said vias.
70. A sensor apparatus as claimed in claim 67 wherein the substrate comprises an electronic circuit formed onto its backside.
71. The sensor apparatus as claimed in any of claims 58 to 70 further comprising an aqueous solution and a plurality of membranes comprising amphiphilic molecules in the wells of the well array structure to encapsulate the aqueous solution therein, thereby forming an array of discrete electrically isolated volumes
72. The sensor apparatus as claimed in claim 71, wherein the aqueous solution is a polar medium.
73. The sensor apparatus as claimed in claim 71 or 72, wherein the amphiphilic molecules comprise a hydrophilic head group and a hydrophobic tail group, or a triblock copolymer.
74. The sensor apparatus as claimed in any of claims 58 to 73, wherein the well array structure comprises a base and partitions extending from the base that define the wells and constrain an aqueous solution in a well from contacting aqueous solution in neighbouring wells.
75. The sensor apparatus as claimed in claim 74 wherein the partitions comprise inner portions defining inner recesses and outer portions.
76. The sensor apparatus as claimed in claim 74 wherein the inner recesses have surfaces having a patterning comprising a plurality of indentations that extend outwardly of the inner recess.
77. The sensor apparatus as claimed in claim 75 or 76 wherein the outer portions have surfaces having a patterning comprising a plurality of indentations that extend outwardly of the inner portions.
78. The sensor apparatus as claimed in any of claims 74 to 77 wherein the outer ends of the partition extend in a common plane.